Active matrix display device using aluminum alloy in scanning si

Details Active matrix display device using aluminum alloy in scanning si Active matrix display device using aluminum alloy in scanning si

1996-10-04

1998-07-14

Sikes, William L.

Liquid crystal cells, elements and systems

Particular excitation of liquid crystal

Electrical excitation of liquid crystal

349 43, 349139, G02F 1136, G02F 11343

Patent

active

057812551

ABSTRACT:
An anodized oxide film of Al is formed on a scanning signal line and a gate electrode. Al--Ta is used as material of each of the scanning signal line and gate electrode. The thickness of the anodized oxide film is set to 1,000 angstroms or more. The fabrication yield and reliability can be improved.

REFERENCES:
patent: 5349205 (1994-09-01), Kobayashi et al.
patent: 5352907 (1994-10-01), Matsuda et al.
patent: 5367179 (1994-11-01), Mori et al.

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