Active mask lithography

Details Active mask lithography Active mask lithography

2006-04-27

2008-10-14

Wells, Nikita (Department: 2881)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C430S313000, C430S311000, C438S542000, C438S005000, C700S121000

Reexamination Certificate

active

07435514

ABSTRACT:
An active mask emits a patterned energy flux in response to an energy input.

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