Active layer mask with dummy pattern

Details Active layer mask with dummy pattern Active layer mask with dummy pattern

1996-05-16

1999-05-11

Barts, Samuel

Fishing, trapping, and vermin destroying

H01L21/283

Patent

active

059027525

ABSTRACT:
A method of designing an active layer mask with a dummy pattern by computer aided design (CAD) in shallow trench isolation using chemical mechanical polishing (CMP) to achieve global planarization. In this method, an original mask is provided with an active region including a diffusion area pattern, a polysilicon area pattern and a well area pattern. The diffusion area pattern and the polysilicon area pattern are expanded by an area of dimension a and the well area pattern is extended inward and outward to an area of dimension b. The expanded diffusion, polysilicon and well areas form a first pattern area. The first pattern area is subtracted from the whole region to obtain a second pattern area. A third pattern area is obtained by performing an AND operation on a dummy array pattern and the second pattern area. Expanding the third pattern area to an area of dimension c, a fourth pattern area is obtained. Finally an active layer mask with a dummy pattern is obtained by performing an OR operation on the fourth pattern area and the diffusion area pattern.

REFERENCES:
patent: 5556805 (1996-09-01), Tanizawa et al.

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