Active damping apparatus, exposure apparatus and device...

Details Active damping apparatus, exposure apparatus and device... Active damping apparatus, exposure apparatus and device...

2007-09-04

2007-09-04

Burch, Melody M. (Department: 3683)

Spring devices

Resilient shock or vibration absorber

Including energy absorbing means or feature

C267S140150, C248S638000

Reexamination Certificate

active

11130240

ABSTRACT:
An active damping apparatus for damping vibration due to driving of a stage and/or counter-mass mounted on an isolation table in an exposure device for the manufacture of semiconductor devices has a setting unit for selecting the stage and/or the counter-mass to drive and setting a control mode according to what is to be driven. The apparatus further has a control input switch that sets up a control loop for inputting control target values for driving the stage and/or the counter-mass to an isolation table controller so as to offset the drive reaction torque generated by the movement of the stage and/or counter-mass.

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