Active damping apparatus, exposure apparatus and device...

Details Active damping apparatus, exposure apparatus and device... Active damping apparatus, exposure apparatus and device...

2005-08-30

2005-08-30

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S075000, C355S072000

Reexamination Certificate

active

06937317

ABSTRACT:
An active damping apparatus including an isolation table mounting a stage and a counter-mass, an isolation table controller operatively connected to the isolation table for supporting the isolation table and adjusting a position and an attitude of the isolation table, a setting unit operatively connected to the controller and adapted to select a combination of the stage and/or the counter-mass to be driven and to set a drive control mode according to what is to be driven, and a control input switch operatively connected to the setting unit and adapted to select a control loop that inputs into the isolation table controller a control target value for adjusting the drive of that which is to be driven according to the drive control mode selected by the setting unit. The active damping apparatus damps vibration by driving the stage and/or counter-mass mounted on the isolation table so as to offset a drive reaction torque and a counter-mass movement moment.

REFERENCES:
patent: 5936710 (1999-08-01), Itoh et al.
patent: 6160612 (2000-12-01), Itoh et al.
patent: 6408045 (2002-06-01), Matsui et al.
patent: 2002/0140921 (2002-10-01), Morisada
patent: 11-264444 (1999-09-01), None

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