Active cantilever for nanomachining and metrology

Measuring and testing – Surface and cutting edge testing – Roughness

Reexamination Certificate

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Reexamination Certificate

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06880388

ABSTRACT:
A probe assembly suited for use in a scanning probe microscope (SPM) system includes a cantilever having an attachment to a main body portion. A suitable tip disposed at the free end of the cantilever provides various functions. According to various embodiments of the invention, an interference structure is provided to limit the range of deflection of the probe.

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