Active anti-vibration apparatus and method of manufacturing the

Details Active anti-vibration apparatus and method of manufacturing the Active anti-vibration apparatus and method of manufacturing the

1996-06-12

1998-05-12

Williams, Hezron E.

Measuring and testing

Vibration

Vibrator

73DIG10, 73DIG1, 248550, 318649, G01M 700

Patent

active

057508976

ABSTRACT:
An active anti-vibration apparatus detects the motion of an anti-vibration table for supporting equipment with a plurality of sensors and controls actuators on the basis of detection outputs from the sensor. The sensors are arranged such that, when a motion parameter of the anti-vibration table is represented by a vector P, and an output signal group from the plurality of sensors is represented by a vector S, a condition number of a matrix A defined by an equation S=AP established between the vector P and the vector S in accordance with a geometrical arrangement of the plurality of sensors is minimized.

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patent: 5478043 (1995-12-01), Wakui

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