Active anti-vibration apparatus and exposure apparatus and...

Details Active anti-vibration apparatus and exposure apparatus and... Active anti-vibration apparatus and exposure apparatus and...

2005-03-08

2005-03-08

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C355S072000, C355S075000, C355S076000

Reexamination Certificate

active

06864962

ABSTRACT:
An anti-vibration apparatus includes a table, a pneumatic spring for applying a force to the table, an electromagnetic actuator for applying a force to the table, and a first generator which generates a driving signal for the electromagnetic actuator based on at least one of a target position and a target speed with respect to a movable object on the table.

REFERENCES:
patent: 5876012 (1999-03-01), Haga et al.
patent: 5936710 (1999-08-01), Itoh et al.
patent: 6128552 (2000-10-01), Iwai et al.
patent: 6160612 (2000-12-01), Itoh et al.
patent: 6322060 (2001-11-01), Mayama et al.
patent: 6364294 (2002-04-01), Gennesseaux et al.
patent: 6378672 (2002-04-01), Wakui
patent: 11-72136 (1999-03-01), None
patent: 11-264444 (1999-09-01), None

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