Active anti-vibration apparatus

Details Active anti-vibration apparatus Active anti-vibration apparatus

1998-03-18

2000-02-08

Berger, Derek J.

Supports

With condition responsive control means

248638, 188267, 267136, F16M 1300

Patent

active

060219912

ABSTRACT:
An active anti-vibration apparatus includes an anti-vibration mount, which has an actuator and a vibration sensor, for supporting an anti-vibration table, and a control unit for driving the actuator on the basis of output from the vibration sensor. The control unit separates the output from the vibration sensor into high frequency components and low frequency components, applies proper compensation calculation for the respective separated frequency components, and drives the actuator.

REFERENCES:
patent: 4770438 (1988-09-01), Sugasawa et al.
patent: 5121898 (1992-06-01), Yasuda et al.
patent: 5124938 (1992-06-01), Algrain
patent: 5285995 (1994-02-01), Gonzalez et al.
patent: 5478043 (1995-12-01), Wakui
patent: 5653317 (1997-08-01), Wakui
patent: 5750897 (1998-05-01), Kato
patent: 5823307 (1998-10-01), Schubert et al.

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