Activation effect on carbon nanotubes

Semiconductor device manufacturing: process – Electron emitter manufacture

Reexamination Certificate

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C977S858000, C977S888000, C156S247000, C313S310000, C445S050000, C445S051000, C438S099000

Reexamination Certificate

active

10269577

ABSTRACT:
Particles, which may include nanoparticles, are mixed with carbon nanotubes and deposited on a substrate to form a cold cathode. The particles enhance the field emission characteristics of the carbon nanotubes. An additional activation step may be performed on the deposited carbon nanotube mixture to further enhance the emission of electrons.

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