Activated gas generator

Details Activated gas generator Activated gas generator

1978-04-19

1980-06-10

Grimley, Arthur T.

Electric heating

Metal heating

Of cylinders

219 1055R, 315 39, H05B 906

Patent

active

042074525

ABSTRACT:
An activated gas generator which comprises a microwave absorber containing, for example, water and surrounding a dielectric tube concurrently to absorb microwaves leaking along the dielectric tube and also cool it. The dielectric tube is formed in a gas pipe which extends through a microwave irradiation furnace and which is connectable at a raw gas source and at its other end to a reaction chamber and a vacuum pump. The microwave absorber is mounted at least to a portion of the tube adjacent to the reaction chamber and vacuum pump.

REFERENCES:
patent: 3392303 (1968-07-01), Wolf et al.
patent: 3476968 (1969-11-01), Omura
patent: 3522476 (1970-08-01), Puschner
patent: 3535482 (1970-10-01), Kluck et al.
patent: 3577207 (1971-05-01), Kirjushin
patent: 3641389 (1972-02-01), Leidigh
patent: 3649868 (1972-03-01), Bensussan
patent: 3906892 (1975-09-01), Van Cakenberghe
patent: 4049940 (1977-09-01), Moisan et al.
patent: 4090055 (1978-05-01), King
Hollahan, J. R., Techniques and Applications of Plasma Chemistry, J. Wiley & Sons 1974, pp. 120-121.

Affiliated with

Also associated with

Rating

Activated gas generator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Activated gas generator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Activated gas generator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-864331