Actinic radiation source and uses thereofor

Details Actinic radiation source and uses thereofor Actinic radiation source and uses thereofor

1997-06-11

2000-10-31

Patel, Nimeshkumar D.

Electric lamp and discharge devices

Cathode ray tube

Electron permeable window

H01J 2970

Patent

active

061407550

ABSTRACT:
An actinic radiation source (20) includes an anode (36) upon which an electron beam from a cathode ray gun (24) impinges. The anode (36) includes a window area (52) formed by a silicon membrane. The electron beam upon striking the anode (36) permeates the window area (52) to penetrate into medium surrounding actinic radiation source (20). A method for making an anode (36) uses a substrate having both a thin first layer (44) and a thicker second layer (46) of single crystal silicon material between which is interposed a layer of etch stop material (48). The second layer (46) is anisotropically etched to the etch stop material (48) to define the electron beam window area (52) on the first layer (44). That portion of the etch stop layer (48) exposed by etching through the second layer (46) is then removed. The anode (36) thus fabricated has a thin, monolithic, low-stress and defect-free silicon membrane electron beam window area (52) provided by the first layer of the substrate.

REFERENCES:
patent: 4468282 (1984-08-01), Neukermans
patent: 5612588 (1997-03-01), Wakalopulos

Affiliated with

Also associated with

Rating

Actinic radiation source and uses thereofor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Actinic radiation source and uses thereofor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Actinic radiation source and uses thereofor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2055733