Acrylic or methacrylic acid derivatives and polymers obtained th

Details Acrylic or methacrylic acid derivatives and polymers obtained th Acrylic or methacrylic acid derivatives and polymers obtained th

1998-04-28

1999-01-05

Richter, Johann

Organic compounds -- part of the class 532-570 series

Organic compounds

Heterocyclic carbon compounds containing a hetero ring...

549 88, 558443, 5263294, 526341, 560128, 560187, C07D30506, C07D33104, C07C25503, C08F 2010

Patent

active

058565213

ABSTRACT:
A monomer of the formula: ##STR1## wherein R5, R6 and R7 are independently hydrogen, alkyl, cyano, alkyloxycarbonyl or carbamoyl; Z is a spacer or a direct link; and R is hydroxyalkyl having a protected terminal hydroxy, can produce a polymer useful for producting a resist composition.

REFERENCES:
patent: 3728322 (1973-04-01), Freyermuth et al.
patent: 5059698 (1991-10-01), Schulthess et al.
Derwent WPI, Abstract of JP 7-199467 (Aug. 4, 1995).
Derwent WPI, Abstract of JP 8-82925 (Mar. 26, 1996).
Derwent WPI, Abstract of JP 7-234511 (Sep. 5, 1995).

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