Acoustically agitated delivery

Details Acoustically agitated delivery Acoustically agitated delivery

1998-07-16

2000-08-22

Rose, Robert A.

Abrading

Abrading process

Abradant supplying

451446, 366127, B24B 5700

Patent

active

061063746

ABSTRACT:
A chemical mechanical polishing apparatus comprises a delivery system for supplying a slurry, wherein the slurry includes suspended particles and at least one acoustic element, connected to the delivery system, the acoustic element generating sound waves for agitating the slurry and maintaining the particles in suspension.

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