Measuring and testing – Gas analysis – Detector detail
Reexamination Certificate
2006-11-14
2006-11-14
Williams, Hezron (Department: 2856)
Measuring and testing
Gas analysis
Detector detail
C073S029010, C073S029050, C073S031050, C073S335020, C310S31300R, C310S31300R, C333S141000, C333S150000, C333S193000
Reexamination Certificate
active
07134319
ABSTRACT:
An acoustic wave sensor apparatus is disclosed, which generally includes a piezoelectric substrate having a surface thereon. One or more interdigital transducers and a passivation layer can be formed upon the piezoelectric substrate. Additionally, an absorbent material can be formed upon the acoustic path (IDTs, electrodes, etc), such that the interdigital transducers respond to a plurality of acoustic waves propagating across the surface of the piezoelectric substrate, thereby providing data indicative of humidity in the vicinity of the piezoelectric substrate, along with the passivation layer and the interdigital transducers. Additionally, one or more heaters can be formed upon a side of the piezoelectric substrate opposite the side of the piezoelectric substrate upon which the interdigital transducers, the passivation and the absorbent material are located. The heater can be preferably configured from a material such as platinum.
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PCT-Notification of Transmittal of The International Search Report and The Written Opinion of the International Searching Authority, or the Declaration, Date of Mailing Dec. 23, 2005.
Honeywell International , Inc.
Lopez Kermit D.
Ortiz Luis M.
Rogers David A.
Williams Hezron
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