Acoustic wave sensor apparatus, method and system using wide...

Measuring and testing – Gas analysis – By vibration

Reexamination Certificate

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C073S024010, C310S31300R

Reexamination Certificate

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06848295

ABSTRACT:
An acoustic wave sensor to detect an analyte, the sensor comprising a piezoelectric material including a wide bandgap semiconductor material grown using plasma source molecular beam epitaxy.

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