Acoustic wave microsensors for measuring fluid flow

Details Acoustic wave microsensors for measuring fluid flow Acoustic wave microsensors for measuring fluid flow

1989-10-02

1991-04-02

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

7320415, G01F 168

Patent

active

050038222

ABSTRACT:
The use of a surface acoustic wave (SAW) device to measure rate of fluid flow. A SAW oscillator heated to a suitable temperature above ambient is placed in the path of the flowing fluid. Convective cooling caused by fluid flow results in a change in the oscillator frequency. A 73 MHz oscillator fabricated on 128.degree. rotated Y-cut lithium niobate substrate and heated to 55.degree. C. above ambient shows a frequency variation greater than 142 kHz for flow rate variation from 0 to 1000 cm.sup.3 /min.

REFERENCES:
patent: 4478076 (1984-10-01), Bohrer
patent: 4680963 (1987-07-01), Tabata et al.
patent: 4726255 (1988-02-01), Brace et al.
patent: 4932255 (1990-06-01), Brace et al.
Ahmad, "Surface Acoustic Wave Flow Sensor" presented IEEE Ultrasonics Symposium on 10/17/85.

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