Measuring and testing – Volume or rate of flow – By measuring vibrations or acoustic energy
Reexamination Certificate
2006-11-28
2006-11-28
Thompson, Jewel (Department: 2855)
Measuring and testing
Volume or rate of flow
By measuring vibrations or acoustic energy
Reexamination Certificate
active
07140261
ABSTRACT:
An acoustic wave flow sensor is disclosed, which includes a sensor substrate and an acoustic wave diaphragm etched upon the sensor substrate, wherein mechanical stress or strain is concentrated in the acoustic wave diaphragm. One or more interdigital transducers can be configured upon the acoustic wave diaphragm, wherein the sensor substrate, the acoustic wave diaphragm and the interdigital transducer(s) form an acoustic wave flow sensor, such that when the interdigital transducer and the acoustic wave diaphragm are exposed to a fluid in flow, the fluid in flow causes the acoustic wave diaphragm to experience a change in the mechanical stress or strain resulting in a detectable frequency and/or phase change in order to provide an indication of fluid flow.
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Liu James Z T
Rahman Aziz
Honeywell International , Inc.
Lopez Kermit D.
Shelby William B.
Thompson Jewel
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