Acoustic wave etch rate sensor system

Details Acoustic wave etch rate sensor system Acoustic wave etch rate sensor system

2008-01-29

2008-01-29

Chapman, John E. (Department: 2856)

Measuring and testing

Vibration

Resonance, frequency, or amplitude study

C073S061490, C422S053000

Reexamination Certificate

active

11156012

ABSTRACT:
An acoustic wave sensor system for monitoring the etch rate or etch ability of a selective material has an acoustic wave sensing device having a piezoelectric substrate and at least one electrode coupled to the substrate for generating a propagating acoustic wave and for detecting changes in frequency or other propagation characteristics of the acoustic wave. A selective material is disposed on the substrate. Changes in propagation characteristics of the wave caused by etching of the selective material by an etchant can be analyzed to evaluate the etching rate or etch ability of the selective material. The sensing system can have a wireless sensing device which device is mountable in an oil filter system for monitoring the corrosion of the engine. The sensing device can be configured as BAW, SH-SAW, SH-APM, FPM devices or other acoustic wave devices.

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