Acoustic wave etch rate sensor system

Details Acoustic wave etch rate sensor system Acoustic wave etch rate sensor system

2008-01-29

2008-01-29

Chapman, John E. (Department: 2856)

Measuring and testing

Vibration

Resonance, frequency, or amplitude study

C073S061490, C422S053000

Reexamination Certificate

active

07322243

ABSTRACT:
An acoustic wave sensor system for monitoring the etch rate or etch ability of a selective material has an acoustic wave sensing device having a piezoelectric substrate and at least one electrode coupled to the substrate for generating a propagating acoustic wave and for detecting changes in frequency or other propagation characteristics of the acoustic wave. A selective material is disposed on the substrate. Changes in propagation characteristics of the wave caused by etching of the selective material by an etchant can be analyzed to evaluate the etching rate or etch ability of the selective material. The sensing system can have a wireless sensing device which device is mountable in an oil filter system for monitoring the corrosion of the engine. The sensing device can be configured as BAW, SH-SAW, SH-APM, FPM devices or other acoustic wave devices.

REFERENCES:
patent: 4691714 (1987-09-01), Wong et al.
patent: 4782332 (1988-11-01), Cipris et al.
patent: 4792791 (1988-12-01), Cipris et al.
patent: 5208162 (1993-05-01), Osborne et al.
patent: 5235235 (1993-08-01), Martin et al.
patent: 5274335 (1993-12-01), Wang et al.
patent: 5301643 (1994-04-01), Garcyalny
patent: 5336396 (1994-08-01), Shetley
patent: 5852229 (1998-12-01), Josse et al.
patent: 5856198 (1999-01-01), Joffe et al.
patent: 5869763 (1999-02-01), Vig et al.
patent: 5878708 (1999-03-01), Ruman
patent: 6029500 (2000-02-01), Tom
patent: 6044332 (2000-03-01), Korsah et al.
patent: 6076406 (2000-06-01), Blair et al.
patent: 6293136 (2001-09-01), Kim
patent: 6457361 (2002-10-01), Takeuchi et al.
patent: 6508100 (2003-01-01), Berndorfer
patent: 6557396 (2003-05-01), Ismail et al.
patent: 6662642 (2003-12-01), Breed et al.
patent: 6776024 (2004-08-01), Jakoby
patent: 6786080 (2004-09-01), Jakoby et al.
patent: 6799458 (2004-10-01), Ismail et al.
patent: 2002/0078752 (2002-06-01), Braunling et al.
patent: 2003/0233864 (2003-12-01), Rodier
patent: 2004/0035398 (2004-02-01), Klugl et al.
patent: 61028841 (1986-02-01), None
patent: WO 98/19156 (1998-05-01), None
B. Jakoby, M. Scherer, M. Buskies, H. Eisenschmid;An Automotive Engine Oil Viscosity SensorIEEE Sensors Journal vol. 3 No. 5 Oct. 2003, pp. 562-568.
R.M. Lee, X.J. Zhang, J.M. Hammond;A Remote Acoustic Engine Oil Ouality SensorDept. of Electrical & Computer Engineering, University of Maine, 1997 IEEE Ultrasonics Symposium, pp. 419-422.
X. Zhang;An On-Board Automobile Engine Oil Quality SensorThesis, The Graduate School University of Maine, Aug. 1998.

Affiliated with

Also associated with

Rating

Acoustic wave etch rate sensor system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Acoustic wave etch rate sensor system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Acoustic wave etch rate sensor system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2769786