Acoustic wave enhanced spin coating method

Details Acoustic wave enhanced spin coating method Acoustic wave enhanced spin coating method

1996-12-23

1999-01-12

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Pretreatment of substrate or post-treatment of coated substrate

427346, 427600, B01J 1908

Patent

active

058584757

ABSTRACT:
A method is disclosed to improve the planarization of a coating upon a substrate, in particular to improve the planarization of a photoresist or spin-on-glass coating upon a semiconductor wafer. This is achieved by coupling an ultrasonic wave generator to either the chuck or the spindle of the chuck. Ultrasonic waves emanating from the ultrasonic generator are induced into the coating, vibrating it. The vibration causes coating material to fill in the valleys of the coating, thus planarizing the surface of the coating.

REFERENCES:
patent: 5472370 (1995-12-01), Malshe et al.

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