Acoustic wave enhanced spin coater

Details Acoustic wave enhanced spin coater Acoustic wave enhanced spin coater

1998-11-20

2000-02-01

Edwards, Laura

Coating apparatus

With means to centrifuge work

118 57, 118500, B05C 1300

Patent

active

060198443

ABSTRACT:
A method and an apparatus are disclosed to improve the planarization of a coating upon a substrate, in particular to improve the planarization of a photoresist or spin-on-glass coating upon a semiconductor wafer. This is achieved by coupling an ultrasonic wave generator to either the chuck or the spindle of the chuck. Ultrasonic waves emanating from the ultrasonic generator are induced into the coating, vibrating it. The vibration causes coating material to fill in the valleys of the coating, thus planarizing the surface of the coating.

REFERENCES:
patent: 3862856 (1975-01-01), Shipman
patent: 4633804 (1987-01-01), Arii
patent: 5099781 (1992-03-01), Frank
patent: 5395803 (1995-03-01), Adams
patent: 5454871 (1995-10-01), Liaw et al.
patent: 5472370 (1995-12-01), Malshe et al.
patent: 5609995 (1997-03-01), Akram et al.
patent: 5803970 (1998-09-01), Tateyama
Julian R. Frederick, Ultrasonic Engineering, pp. 1-3, 1965.
Antony Barber, Handbook of Noise and Vibration Control-6th Edition, "Glossary of Terms", pp. 2-4, 1992.

Affiliated with

Also associated with

Rating

Acoustic wave enhanced spin coater does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Acoustic wave enhanced spin coater, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Acoustic wave enhanced spin coater will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-934534