Acoustic wave enhanced developer

Details Acoustic wave enhanced developer Acoustic wave enhanced developer

1998-12-21

2000-01-04

Mathews, Alan A.

Photography

Fluid-treating apparatus

Fluid application to one side only of photographic medium

396633, 134 1, 134902, G03D 500

Patent

active

060102551

ABSTRACT:
A method and an apparatus are disclosed for enhancing the solution diffusibility of a developing liquid in a semiconductor wafer developing unit through the agitation of the liquid by acoustic power. Two embodiments are described using sonic and ultrasonic waves. In the first embodiment, a sonic wave couples into the developing liquid, agitating it and thereby enhancing its solution diffusibility. In the second embodiment, an ultrasonic wave couples into the semiconductor wafer, causing the photoresist pattern to vibrate, again enhancing the solution diffusibility of the developing liquid.

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patent: 5368054 (1994-11-01), Koretsky et al.
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patent: 5454871 (1995-10-01), Liaw et al.
patent: 5650251 (1997-07-01), Ishiwata et al.
patent: 5858475 (1999-01-01), Chiu
patent: 5868866 (1999-02-01), Mackawa et al.

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