Acoustic wave device using plate modes with surface-parallel dis

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310312, 73 232, 73 2401, 73 32A, 73597, H01L 4108

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active

051171465

ABSTRACT:
Solid-state acoustic sensors for monitoring conditions at a surface immersed in a liquid and for monitoring concentrations of species in a liquid and for monitoring electrical properties of a liquid are formed by placing interdigital input and output transducers on a piezoelectric substrate and propagating acoustic plate modes therebetween. The deposition or removal of material on or from, respectively, a thin film in contact with the surface, or changes in the mechanical properties of a thin film in contact with the surface, or changes in the electrical characteristics of the solution, create perturbations in the velocity and attenuation of the acoustic plate modes as a function of these properties or changes in them.

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