Acoustic wave device manufacturing method

Details Acoustic wave device manufacturing method Acoustic wave device manufacturing method

1995-06-02

1997-12-30

Hughes, S. Thomas

Metal working

Piezoelectric device making

29593, 29600, 324525, 324716, 324718, 310313B, 333193, H03H 308, G01R 3100

Patent

active

057016453

ABSTRACT:
A method for making an acoustic wave device. The method has steps of providing a substrate suitable for acoustic wave devices and processing the substrate to provide a patterned metallization thereon. The patterned metallization includes an acoustic wave filter pattern. The method also has steps of measuring a sheet resistance associated with the acoustic wave filter pattern, determining a resistance of a test pattern associated with the acoustic wave filter pattern to provide a measured resistance and computing an estimated average linewidth for the acoustic wave filter pattern from the measured resistance and the sheet resistance.

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patent: 5162689 (1992-11-01), Fliegel et al.
patent: 5243249 (1993-09-01), Miyashita et al.

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