Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1994-05-05
1996-03-12
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
H01L 4108
Patent
active
054989205
ABSTRACT:
A surface acoustic wave device adapted to attain a higher acoustic velocity than conventionally by realizing SH waves excitable at a higher frequency than the fundametal mode of Rayleigh waves. Aluminum is sputtered for deposition on the R-plane of a sapphire substrate 1 using a sputter ion source, and at the same time, the R-plane of the substrate 1 is irradiated with a nitrogen ion beam having energy of 50 to 250 eV at a current density of 0.2 to 1.0 mA/cm.sup.2 using an assist ion source to form an aluminum nitride thin film 2 on the R-plane of the substrate 1 with the [00.1] axis of the film tilted with respect to a normal to the substrate.
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Tsubouchi et al., "Zero-Temperature-Coefficient SAW Devices on AIN Epitaxial Films", IEEE Transactions on Sonics and Ultrasonics, vol. SU-32, No. 5, Sep., 1985.
Okano Hiroshi
Shibata Kenichi
Takahashi Yusuke
Tanaka Naoki
Budd Mark O.
Sanyo Electric Co,. Ltd.
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