Acoustic transducers utilizing ZnO thin film

Details Acoustic transducers utilizing ZnO thin film Acoustic transducers utilizing ZnO thin film

1985-03-18

1987-09-08

Salce, Patrick R.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310364, 310365, H01L 4108

Patent

active

046926534

ABSTRACT:
In an acoustic transducer comprising a lower electrode, a zinc oxide (ZnO) film, which is a piezo-electrically active body, and at least one upper electrode superposed one after another on a substrate, the lower electrode consists of at least one gold polycrystalline film deposited by evaporation, interposing a thin chromium film, on the substrate and crystallites of the gold polycrystalline film are so oriented that the standard deviation of the locking curve for the (111) diffraction beam is smaller than 3.degree.. In order to obtain a gold film having such a good orientation, the thickness of the chromium film is limited to 20 nm at largest. The zinc oxide film thus superposed on the lower electrode thus composed is excellent in c-axis orientation and thus permits to obtain a high electro-mechanical coupling factor efficiency of the acoustic transducer.

REFERENCES:
patent: 3846649 (1974-11-01), Lehmann et al.
patent: 4339683 (1982-07-01), Scott et al.

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