Acoustic surface wave element

Details Acoustic surface wave element Acoustic surface wave element

1989-07-25

1990-12-18

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313D, 310313R, 333194, H01L 4108

Patent

active

049788795

ABSTRACT:
An acoustic surface wave element having an oscillation frequency stable against temperature changes, and a wide range of oscillation frequency adjustment, is provided by an acoustic surface wave element comprising: a substrate of a 36.degree. rotated Y-cut single crystal lithium tantalate having X, Y and Z crystal axes and a top surface and side walls; electrodes formed on the top surface of the substrate such that an acoustic surface wave is propagated in a direction of the X-axis of the substrate and an oscillation of the acoustic surface wave occurs at a predetermined frequency, the electrodes having a thickness equal to 1 to 4% of a wavelength of the acoustic surface wave at the oscillation; and a plasma CVD-deposited layer of silicon dioxide covering the electrodes and the substrate, the silicon dioxide layer having a refractive index of 1.445 to 1.486 and a thickness equal to 16 to 26% of the wavelength of the acoustic surface wave at the oscillation.

REFERENCES:
patent: 3786373 (1974-01-01), Schulz et al.
patent: 3795879 (1974-03-01), Whitehouse et al.
patent: 3952268 (1976-04-01), Schulz et al.
patent: 3965444 (1976-06-01), Willingham et al.
W. Chujo et al., "SiO.sub.2 /LiTaO.sub.3, LiNbO.sub.3 Structure Acoustic Surface Wave Materials Fablicated by Plasma CVD Method", Dentsu Gakkai Cho-ompha Kenkyu Shiryo US80-3, Apr. 1980, pp. 15-20.
W. Chujo et al., "SiO.sub.2 /LiTaO.sub.3, LiNbO.sub.3 Structure Acoustic Surface Wave Materials Fablicated by Plasma CVD Method", Dentsu Gakkai Cho-ompa Kenkyu Shiryo US79-16, Jun. 1979, pp. 25-30.

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