Acoustic sensor as proximity detector

Details Acoustic sensor as proximity detector Acoustic sensor as proximity detector

1997-01-02

1998-12-22

Larkin, Daniel S.

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528, G01B 1700

Patent

active

058522328

ABSTRACT:
An acoustic sensor used with a first sensor (such as a profilometer, scanning probe microscope or the like) allows for the positioning of the first sensor with respect to the sample. The acoustic sensor has a greater range than a profilometer or a scanning probe microscope, and a relatively quick response time, which allows it to be an effective proximity detector. Additionally, the acoustic sensor is not affected by the material of the sample's surface layer.

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Akamine et al., "Acoustic Microscopy Beyond the Diffraction Limit: An Application of MicroFabrication", IEEE, 1991, pp. 857-859.
Griffith et al. "Dimensional Metrology with Scanning Probe Microscopes", J. Appl. Phys., vol. 74, No. 09, 01 Nov. 1993, pp. R83-R109.
Briggs, Andrew; "An introduction to scanning acoustic microscopy"; Oxford University Press; Royal Microscopical Society; 1985.
HS1000 HiSPEED Scanning Acoustic Microscope Brochure; Sonix Inc.; Springfield, Virginia; undated.
"The Application of Scanning Acoustic Microscopy to Control Moisture/Thermal-Induced Package Defects," T.M. Moore et al., ISTFA Failure Analysis Forum, 29 Oct.--2 Nov. 1990, pp. 251-258.

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