Acoustic screen scan microscope for the examination of an object

Measuring and testing – Vibration – Resonance – frequency – or amplitude study

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73635, 73105, G01B 528, G01B 728, G01B 2120

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active

052129870

ABSTRACT:
An acoustic scanning microscope uses damping of a resonant acoustic oscillator and an acoustic near-field effect. In a preferred embodiment, a 32 KHz tuning fork serving as an acoustic oscillator with a 50 nm point achieves a vertical resolution of 5 nm and a horizontal resolution of 50 nm in the case of a minimum distance of approximately 50 nm. Frequency or amplitude variation of the resonant acoustic oscillator can be used. The acoustic near-field effect is dependent on the coupling medium, e.g., air, and the pressure, e.g., normal pressure.

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