Acoustic resonators

Details Acoustic resonators Acoustic resonators

2006-11-28

2006-11-28

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S324000, C310S334000, C029S025350

Reexamination Certificate

active

07141913

ABSTRACT:
An acoustic resonator of one inventive aspect includes a substrate, at least one generally crystalline primer layer provided on the substrate either directly or on top of one or more intermediate layers, a generally smooth and generally crystalline electrode layer provided on the primer layer, and a piezoelectric layer provided on the electrode layer. The primer layer, or at least one of the primer layers, has a crystallographic structure belonging to a first crystal system, and the electrode layer has a crystallographic structure belonging to a second crystal system which is different to the first system. The atomic spacing of the primer layer or at least one of said primer layers and that of the electrode matches to within about 15%.

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Y. Yoshino et al., “Effect of Buffer Electrodes In Crystallization of Zinc Oxide Thin Film for Thin Film Bulk Accoustic Wave Resonator,” Mai. Res. Soc. Symp. Proc. vol. 605, 2000 Materials Research Society, pp. 267-272.

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