Acoustic resonator with Al electrodes on an AlN layer and using

Details Acoustic resonator with Al electrodes on an AlN layer and using Acoustic resonator with Al electrodes on an AlN layer and using

1984-07-18

1985-12-03

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310320, 310311, H01L 4108

Patent

active

045568120

ABSTRACT:
A method of fabricating an acoustic wave resonator wherein all processing steps are accomplished from a single side of said substrate. The method involves deposition of a multi-layered Al/AlN structure on a GaAs substrate followed by a series of fabrication steps to define a resonator from said composite. The resulting resonator comprises an AlN layer between two Al layers and another layer of AlN on an exterior of one of said Al layers.

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Localized GaAs Etching with Acidic Hydrogen Peroxide Solutions, by Shaw, J. Electrochem. Society, #128, p. 874, Apr. 1981.
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