Acoustic resonator performance enhancement using filled...

Details Acoustic resonator performance enhancement using filled... Acoustic resonator performance enhancement using filled...

2008-05-06

2008-05-06

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C310S312000, C333S189000

Reexamination Certificate

active

07369013

ABSTRACT:
An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a fill region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The fill region is in one of the first and second electrodes.

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