Acoustic resonator and method of making same

Details Acoustic resonator and method of making same Acoustic resonator and method of making same

1983-10-13

1985-03-05

Demers, Arthur P.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204192R, 204192C, 204192SP, 310320, 310321, C23C 1500

Patent

active

045029326

ABSTRACT:
A method of fabricating an acoustic wave resonator wherein all processing steps are accomplished from a single side of said substrate. The method involves deposition of a multi-layered Al/AlN structure on a GaAs substrate followed by a series of fabrication steps to define a resonator from said composite. The resulting resonator comprises an AlN layer between two Al layers and another layer of AlN on an exterior of one of said Al layers.

REFERENCES:
patent: 3486046 (1969-12-01), Zalar
patent: 3568108 (1971-02-01), Poirier et al.
patent: 4189516 (1980-02-01), Dryburgh et al.
patent: 4214018 (1980-07-01), Halon et al.
patent: 4302108 (1981-11-01), Ichihara et al.
patent: 4345176 (1982-08-01), Grudkowski
Lakin et al., 36th Annual Frequency Control Symposium, l982.
Iida et al., J. Electrochem. Soc. 118 (1971), p. 768.
Shaw, J. Electrochem. Soc. 128 (1981), p. 874.
Wang et al., Appl. Phys. Lett. 40 (1982), p. 308.
Nokamura et al., Elect. Lett. 17 (1981), p. 507.
Springer et al., J. Voc. Sci. Technol. 20 (1982), pp. 462-463.
Foster et al., IEEE Trans. on Sonics & Ultrasonics, vol. SU-15, 1968, p. 28.

Affiliated with

Also associated with

Rating

Acoustic resonator and method of making same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Acoustic resonator and method of making same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Acoustic resonator and method of making same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1732989