Acoustic resonator

Details Acoustic resonator Acoustic resonator

2008-05-13

2008-05-13

Takaoka, Dean (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S188000

Reexamination Certificate

active

11024165

ABSTRACT:
A tuneable film bulk acoustic resonator (FBAR) device. The FBAR device includes a bottom electrode, a top electrode and a piezoelectric layer in between the bottom electrode and the top electrode. The piezoelectric layer has a first overlap with the bottom electrode, where the first overlap is defined by a projection of the piezoelectric layer onto the bottom electrode in a direction substantially perpendicular to a plane of the bottom electrode. The FBAR device also includes a first dielectric layer in between the piezoelectric layer and the bottom electrode and a mechanism for reversibly varying an internal impedance of the device, so as to tune a resonant frequency of the FBAR device.

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