Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2005-08-23
2005-08-23
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S189000, C333S191000, C310S335000
Reexamination Certificate
active
06933807
ABSTRACT:
A BAW resonator includes a piezoelectric layer, a first electrode, a second electrode, a substrate, and an acoustic reflector disposed between the substrate and the second electrode. The acoustic reflector has a plurality of layers. A performance of the acoustic reflector is determined by its reflectivity for a longitudinal wave existing in the BAW resonator at the resonance frequency of the BAW resonator and by its reflectivity for a shear wave existing in the BAW resonator at the resonance frequency of the BAW resonator. The layers of the acoustic reflector and layers disposed between the acoustic reflector and the piezoelectric layer are selected, with reference to their number, material, and thickness, such that the transmissivity for the longitudinal wave and the transmissivity for the shear wave in the area of the resonance frequency is smaller than −10 dB.
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Aigner Robert
Fattinger Gernot
Kaitila Jyrki
Marksteiner Stephan
Greenberg Laurence A.
Infineon - Technologies AG
Locher Ralph E.
Stemer Werner H.
Summons Barbara
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