Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1997-07-02
1998-12-22
Larkin, Daniel S.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 904, G01B 1130
Patent
active
058522336
ABSTRACT:
An acoustic microscope allowing both the topography and the elasticity of a sample to be measured at the same time. To this end the displacement of a cantilever with a tip is measured by the deflection of a laser beam. In order to measure the topography, the average deviation of the tip is held constant by a regulation circuit. The regulation circuit consists of a split-photodiode which supplies a neutral signal to the output of a normalizing amplifier which delivers a neutral value. Deviations from this neutral signal are compensated by a z-electrode of a piezocrystal. The elastic properties of the sample are measured by coupling ultrasound into the sample by means of a transducer and the high-frequency displacements of the cantilever with the tip are detected by a second detection device that consists of knife-edge detector and a fast photodiode. The detection device may also consist of a heterodyne time-of-flight interferometer or a capacitive detection scheme.
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Arnold Walter
Rabe Ute
Fraunhofer-Gesellschaft Zur Forderung der Angewandten Forschung
Larkin Daniel S.
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