Acoustic microscope system

Measuring and testing – Vibration – By mechanical waves

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73626, G01N 29000

Patent

active

052110591

ABSTRACT:
The present invention relates to an acoustic microscope system having an ultrasonic probe that is driven with a high-frequency burst signal to radiate an ultrasonic signal and that detects the resulting reflected and irradiated waves, a Z-axis moving device that updates the vertical distance Z between the probe and a material of interest for each sampling position, and device for constructing a V(z) curve from the reflection signals obtained at respective sampling positions. The ultrasonic probe of the invention is provided with an acoustic lens, a first ultrasonic transducer for receiving a leaky surface skimming compressional wave reflected from a sample material on one side of the acoustic lens, and a second ultrasonic transducer also provided on the side of the acoustic lens for receiving a leaky surface acoustic wave.

REFERENCES:
patent: 4503708 (1985-03-01), Kino et al.
patent: 4524621 (1985-06-01), Yamanka
patent: 4541281 (1985-09-01), Chubachi et al.
patent: 4655083 (1987-04-01), Chubachi
Electronic Letters, vol. 19, No. 22, Oct. 27, 1983, London GB, pp. 906-908; M. Nkoonahad et al.: "Rayleigh wave suppression in reflection acoustic microscopy".
IEEE 1987 Ultrasonics Symposium, vol. 2, Oct. 16, 1987, Denver, Colo. USA, pp. 817-821; J. Kushibiki et al.; "Determination of elastic constants by LFB acoustic microscope".

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