Acoustic microscope device

Measuring and testing – Vibration – By mechanical waves

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G01N 2904

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active

044844760

ABSTRACT:
In an acoustic microscope device using an acoustic surface wave, a plurality of interdigital electrodes are provided on an acoustic surface wave propagating medium in a linear or circular manner, and these electrodes are selectively connected to a transmitting signal source via a multiplexer and respective delay lines having such delay times that the acoustic surface waves generated from the selected electrodes are focused at a focal point on the medium. The selection of the electrodes and the delay times of the delay lines are so changed that the focal point is moved two-dimensionally over the medium surface. The acoustic surface waves reflected at the focal points are received by the selected electrodes and electric signals from the electrodes are summed through the delay lines to derive an image signal at the relevant focal point. In this manner, a tomographic image of a specimen near its surface which is made in contact with the medium is formed.

REFERENCES:
patent: 3647899 (1972-10-01), Dias
patent: 3845420 (1974-10-01), Holland et al.
patent: 4364017 (1982-12-01), Tokunaga et al.
Weglein et al., "Scanning Acoustic Microscopy-Application to Fault Detection", 15th Annual Proceedings Reliability Physics, Las Vegas, Nev., USA, Apr. 12-14, 1977.

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