Measuring and testing – Vibration – By mechanical waves
Patent
1981-05-06
1983-07-26
Birmiel, Howard A.
Measuring and testing
Vibration
By mechanical waves
73610, 73620, G01N 2900
Patent
active
043948243
ABSTRACT:
In an acoustic microscope wherein a piezoelectric transducer disposed on one face of an ultrasonic wave focusing lens radiates an ultrasonic wave into the lens and also converts into an electric signal a reflected wave from a specimen arranged on the side of the other face of the lens, a reflected wave from the interface of the lens and the reflected wave from the specimen are caused to interfere with each other.
REFERENCES:
"Acoustic Microscopy Applied to Saw Dispersion & Film Thickness Measurement", Weglein, IEEE Transactions on Sonics and Ultrasonics, vol. SU-27, No. 2, Mar. 1980, pp. 82-86.
"Signal Processing in the Reflective Acoustic Microscope", Attal et al., Electronics Letters, vol. 14, No. 15, pp. 471-473.
Ishikawa Isao
Kanda Hiroshi
Katakura Kageyoshi
Kondo Toshio
Birmiel Howard A.
Hitachi , Ltd.
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