Acoustic method and apparatus for measuring surfaces of wafers a

Details Acoustic method and apparatus for measuring surfaces of wafers a Acoustic method and apparatus for measuring surfaces of wafers a

1980-02-12

1981-07-28

Kreitman, Stephen A.

Measuring and testing

Instrument proving or calibrating

Volume of flow, speed of flow, volume rate of flow, or mass...

73105, 367 99, G01N 2900

Patent

active

042803543

ABSTRACT:
A measurement system wherein an acoustic distance measuring transducer is moved over a flat reference surface, measuring the distance from the transducer to a calibration surface and then to a test surface. The transducer is moved along a path within a ring while the top edge of the ring is used to support the calibration surface and then the test surface. The ring is mounted for rotation so that the transducer can scan a supported surface at a locus of points. Scans across the calibration surface and then the test surface are compared to measure deviations of the test surface from calibration surface.

REFERENCES:
patent: 3500301 (1970-03-01), Meier
patent: 4175441 (1979-11-01), Urbanek et al.
patent: 4206633 (1980-06-01), McKechnie et al.

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