Acoustic method and apparatus for measuring micron and submicron

Details Acoustic method and apparatus for measuring micron and submicron Acoustic method and apparatus for measuring micron and submicron

1979-05-21

1981-08-18

Farley, Richard A.

Communications, electrical: acoustic wave systems and devices

Echo systems

Distance or direction finding

73596, 367114, G01S 1532

Patent

active

042850533

ABSTRACT:
A gauge for measuring variations in distance of a surface relative to a reference by means of phase shifts in a zone of high acoustic impedance. A gauge head is provided with a first orifice for emitting acoustic waves, driven by a reference signal, toward a surface positioned very close to the gauge head, forming a high impedance zone. A second orifice in the gauge head picks up acoustic waves subjected to the zone and these waves are converted to electrical signals for comparison to the reference signal in a phase detector. The phase error between the two signals is indicative of surface distance variations.

REFERENCES:
patent: 2268643 (1942-01-01), Crosby
patent: 2913700 (1959-11-01), Brody
patent: 2985018 (1961-05-01), Williams
patent: 3500301 (1970-03-01), Meier
patent: 3694800 (1972-09-01), Frank
patent: 3918296 (1975-11-01), Kitada
patent: 4175441 (1979-11-01), Urbanek et al.

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