Acoustic crosstalk reduction for capacitive micromachined...

Details Acoustic crosstalk reduction for capacitive micromachined... Acoustic crosstalk reduction for capacitive micromachined...

2007-04-23

2010-06-29

Benson, Walter (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

Reexamination Certificate

active

07745973

ABSTRACT:
A reduced crosstalk capacitive micromachined ultrasonic transducer (CMUT) array is provided. The CMUT array has at least two CMUT array elements deposited on a substrate, at least one CMUT cell in the array element, a separation region between adjacent CMUT array elements, and a membrane formed in the separation region. The membrane reduces crosstalk between adjacent array elements, where the crosstalk is a dispersive guided mode of an ultrasonic signal from the CMUT propagating in a fluid-solid interface of the CMUT array. Each cell has an insulation layer deposited to the substrate. A cell membrane layer is deposited to the insulation layer, where the cell membrane layer has a vacuum gap therein. The cells further have an electrode layer deposited to a portion of the membrane layer, and a passivation layer deposited to the electrode layer, the cell membrane layer and to the insulation layer.

REFERENCES:
patent: 5619476 (1997-04-01), Haller et al.
patent: 6443901 (2002-09-01), Fraser
patent: 6503204 (2003-01-01), Sumanaweera et al.
patent: 7030536 (2006-04-01), Smith et al.
patent: 7408283 (2008-08-01), Smith et al.
patent: 7545075 (2009-06-01), Huang et al.
patent: 2005/0200241 (2005-09-01), Degertekin

Affiliated with

Also associated with

Rating

Acoustic crosstalk reduction for capacitive micromachined... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Acoustic crosstalk reduction for capacitive micromachined..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Acoustic crosstalk reduction for capacitive micromachined... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4238350