Acid-sensitive substance and photosensitive compositions therewi

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

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4302711, 430944, 4302701, 101457, 101463, 101453, 5253288, 5253295, 5253298, 5253297, 526309, 526314, G03F 7021, G03F 7039, G03F 709

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059940239

ABSTRACT:
According to the present invention there is provided a polymer not comprising maleic acid derivatives having acid labile groups pendant from the polymer backbone, characterized in that said pendant groups are represented by

REFERENCES:
patent: 4837124 (1989-06-01), Wu et al.
patent: 5120633 (1992-06-01), Bauer et al.
patent: 5332650 (1994-07-01), Murata et al.
patent: 5340699 (1994-08-01), Haley et al.
patent: 5837420 (1998-11-01), Aoai et al.

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