Acetal-substituted aromatic hydroxy compounds and negative photo

Details Acetal-substituted aromatic hydroxy compounds and negative photo Acetal-substituted aromatic hydroxy compounds and negative photo

1997-09-17

1999-06-29

Truong, Duc

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From phenol, phenol ether, or inorganic phenolate

528100, 528 86, 528403, 528425, 5253333, 549357, 549430, C08G 5900

Patent

active

059169958

ABSTRACT:
There are disclosed an aromatic hydroxy compound or polymer substituted with acetal of Formula (I), (II) or (III), and a negative photoresist composition prepared therefrom. The pattern formed of the negative photoresist composition has good cross sections in addition to being superior in transmissivity to deep uv light and excimer laser and in thermal resistance and storage stability after exposure. ##STR1##

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