Accurate small-spot spectrometry systems and methods

Details Accurate small-spot spectrometry systems and methods Accurate small-spot spectrometry systems and methods

2005-03-22

2005-03-22

Evans, F. L. (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

C356S319000, C356S446000

Reexamination Certificate

active

06870617

ABSTRACT:
The invention is a method and apparatus for determining characteristics of a sample. The system and method provide for detecting a monitor beam reflected off a mirror, where the monitor beam corresponds to the intensity of light incident upon the sample. The system and method also provide for detecting a measurement beam, where the measurement beam has been reflected off the sample being characterized. Both the monitor beam and the measurement beam are transmitted through the same transmission path, and detected by the same detector. Thus, potential sources of variations between the monitor beam and the measurement beam which are not due to the characteristics of the sample are minimized. Reflectivity information for the sample can be determined by comparing data corresponding to the measurement beam relative to data corresponding the monitor beam.

REFERENCES:
patent: 4776695 (1988-10-01), van Pham et al.
patent: 5659397 (1997-08-01), Miller et al.
patent: 5747813 (1998-05-01), Norton et al.
patent: 6738136 (2004-05-01), Norton et al.
patent: 20020021441 (2002-02-01), Norton et al.
patent: 57-106846 (1982-07-01), None
patent: WO 0057127 (2000-09-01), None
K. Goto et al., “On-line System for Measuring Thickness of Hydrated Chromium Oxide Film on Tin Free Steel,”Iron and Steel, Issue 9, 1984, pp. 1088-1094. (includes translation).
G. Harbeke et al., “Rapid Characterization of Polysilicon Films by Means of a UV Reflectometer,”RCA Review, vol. 44, Mar. 1983, pp. 19-29.

Affiliated with

Also associated with

Rating

Accurate small-spot spectrometry systems and methods does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Accurate small-spot spectrometry systems and methods, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Accurate small-spot spectrometry systems and methods will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3376813