Accumulated exposure detection with exposure terminating attenua

Details Accumulated exposure detection with exposure terminating attenua Accumulated exposure detection with exposure terminating attenua

1990-06-18

1991-12-03

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

354416, G01J 120

Patent

active

050702351

ABSTRACT:
The method of exposure control disclosed herein is particularly applicable to the pulsed laser illumination of photosensitive resists. The relative illuminating energy provided by successive laser pulses is measured and the successive measurements are accumulated. When the accumulated value appraoches the desired exposure level within a preselected difference, an attenuator is inserted in the optical path between the laser and the resist thereby to reduce the exposing energy provided by each pulse to a value below the acceptable deviation. The exposure is terminated when the accumulated value effectively reaches the desired exposure level.

REFERENCES:
patent: 3562344 (1985-12-01), Mihara et al.
patent: 4378490 (1983-03-01), d'Auria
patent: 4447717 (1984-05-01), Nohda

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