Accelerometric sensor with flectional vibratory beams

Details Accelerometric sensor with flectional vibratory beams Accelerometric sensor with flectional vibratory beams

1990-08-01

1992-12-15

Razavi, Michael T.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73DIG1, G01P 1508

Patent

active

051706652

ABSTRACT:
The accelerometric sensor is of the type comprising a fixed mass, a mobile mass and two flectional vibrating beams each having ends that are linked to the masses. According to the invention, the masses and the beams consist of one single piece machined in a same plate of material of uniform thickness, e.g. in a piezoelectric material such as quartz. The single piece preferably comprises two second beams each having ends that are integral with the masses and placed on both sides of the vibratory beams. The flexural stiffness of the second beams is higher than that of the vibrating beams.

REFERENCES:
patent: 4479385 (1984-10-01), Koehler
patent: 4751849 (1988-06-01), Paros et al.
patent: 4766768 (1988-08-01), Norling et al.
patent: 4881408 (1989-11-01), Halsing, II et al.
patent: 4939935 (1990-07-01), Amand

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