Accelerometers using silicon on insulator technology

Details Accelerometers using silicon on insulator technology Accelerometers using silicon on insulator technology

1996-08-15

1998-07-14

Mintel, William

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Responsive to non-optical, non-electrical signal

257417, 257418, 257420, 7351421, 7351422, 7351423, 73DIG1, 73DIG4, H01L 2982

Patent

active

057808856

ABSTRACT:
Process for the production of accelerometers using the silicon on insulator method. The process comprises the following stages: a) producing a conductive monocrystalline silicon film on a silicon substrate and separated from the latter by an insulating layer; b) etching the silicon film and the insulating layer up to the substrate in order to fix the shape of the mobile elements and the measuring device; c) producing electric contacts for the measuring devices; d) partial elimination of the insulating layer in order to free the mobile elements, the remainder of the insulating layer rendering integral the substrate and the moving elements.

REFERENCES:
patent: 5006487 (1991-04-01), Stokes
patent: 5381300 (1995-01-01), Thomas et al.
patent: 5500549 (1996-03-01), Takeuchi et al.
patent: 5572057 (1996-11-01), Yamamoto et al.
Rudolf et al, "Precision Accelerometers with Mg Resolution", Sensors and Actuators, A21-A23, 1990, pp. 297-302.
Harendt et al, "Wafer Bonding and its Application to Silicon-on-Insulator Fabrication," Technical Digest HHE '90, 2nd Workshop, Berlin, 1990, pp. 1-6.

Affiliated with

Also associated with

Rating

Accelerometers using silicon on insulator technology does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Accelerometers using silicon on insulator technology, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Accelerometers using silicon on insulator technology will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1884651