Accelerometer with coplanar push-pull force transducers

Details Accelerometer with coplanar push-pull force transducers Accelerometer with coplanar push-pull force transducers

1989-02-27

1991-04-09

Chapman, John

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 1510

Patent

active

050054139

ABSTRACT:
A push-pull accelerometer in which both force transducers lie in a common plane. Thus, when implemented in silicon micromachined device, both transducers can be fabricated from a single crystal layer, thereby producing transducers with closely matched common mode responses.

REFERENCES:
patent: 4215570 (1980-08-01), Eer Nisse
patent: 4221131 (1980-09-01), Albert
patent: 4372173 (1983-02-01), Eer Nisse et al.
patent: 4457651 (1984-08-01), Peters et al.
patent: 4488445 (1984-12-01), Aske
patent: 4718275 (1988-01-01), Norling
patent: 4793194 (1988-12-01), Wilner
patent: 4848157 (1989-07-01), Kobayashi
patent: 4879914 (1989-11-01), Norling

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